1 August 2001 Profilometer for measuring superfine surfaces
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Optical Engineering, 40(8), (2001). doi:10.1117/1.1387994
An interference profilometer for measuring the microprofile of superfine surfaces is described. It has a stabilized He-Ne laser light source with two longitudinal modes and two coaxial interference arms. The measuring arm is focused on the sample surface to form a small spot while the reference arm forms a large spot. As a result, the reference arm provides a constant signal and only the measuring arm will be sensitive to the irregularity of the microprofile. Mechanical vibration has a very small effect on the instrument performance. Even if vibration amplitudes reach 300 nm, the measurement noise is less than 1 nm. The instrument has a vertical resolution better than 0.2 Å root mean square (rms) and smallest form error among existing coaxial profilometers. It is well suited for measuring the microstructure on photoetched surfaces.
Zhaofei Zhou, Weidong Zhou, Wenjie Li, "Profilometer for measuring superfine surfaces," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1387994

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