Novel approach to super-resolution pits readout

Jingsong Wei; Fuxi Gan

doi:10.1117/1.1496790

1 September 2002 Novel approach to super-resolution pits readout

Jingsong Wei, Fuxi Gan

Optical Engineering, Vol. 41, Issue 9, (September 2002). https://doi.org/10.1117/1.1496790

We proposed a novel method to realize the readout of super-resolution pits by using a super-resolution reflective film to replace the reflective layer of the conventional ROM. At the same time, by using Sb as the super-resolution reflective layer and SiN as a dielectric layer, the superresolution pits with diameters of 380 nm were read out by a setup whose laser wavelength is 632.8 nm and numerical aperture is 0.40. In addition, the influence of the Sb thin film thickness on the readout signal was investigated, the results showed that the optimum Sb thin film thickness is 28 to 30 nm, and the maximum CNR is 38 to 40 dB.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Jingsong Wei and Fuxi Gan "Novel approach to super-resolution pits readout," Optical Engineering 41(9), (1 September 2002). https://doi.org/10.1117/1.1496790

Published: 1 September 2002

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