1 December 2002 Fabrication and characterization of hybrid-glass-based axicons
Author Affiliations +
We introduce a process for applying directly UV photopatternable materials and processing methods for the fabrication of binary diffractive optical elements. We design and model a binary axicon—an optical element that produces an almost diffraction free beam at a specified distance from the element. We also synthesize sol-gel-based hybrid glass materials and tailor their processing parameters to fit to the demands of the axicon design. A grating periodicity of 2 μm, an 850-nm structure depth, and certain morphological properties are required to meet the design parameters. The materials are synthesized using zirconium(IV)isopropoxide, methacrylic acid and methacryloxypropyltrimethoxysilane as deposition material precursors. We determine the morphological and shape characteristics of the fabricated axicons as a function of the lithographic exposure parameters. The optical characteristics of the axicons are measured in terms of the axial and radial intensity profiles. The difference between the modeled and measured results is explained.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Terho K. Kololuoma, Terho K. Kololuoma, Kari J. Kataja, Kari J. Kataja, Sanna M. Aikio, Sanna M. Aikio, Janne K. Aikio, Janne K. Aikio, Juha T. Rantala, Juha T. Rantala, } "Fabrication and characterization of hybrid-glass-based axicons," Optical Engineering 41(12), (1 December 2002). https://doi.org/10.1117/1.1518993 . Submission:


Color separation gratings
Proceedings of SPIE (March 09 2000)
Apodised linear axicons
Proceedings of SPIE (November 19 2008)
Micro-optical elements fabricated with single step
Proceedings of SPIE (August 17 2000)
Inorganic-organic hybrid material for lithography
Proceedings of SPIE (November 05 2000)

Back to Top