1 February 2002 Optical performance evaluation of thin-film micromirror array in projection display
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Optical Engineering, 41(2), (2002). doi:10.1117/1.1430421
Abstract
We perform computer simulation and experimental work to investigate how the surface topography of reflecting mirrors affects the optical performance of the thin-film micromirror array (TMA) designed for projection display. We reveal that the form accuracy of mirror surface specified by the peak to valley should be less than 0.3 ?m, so that the reflecting efficiency becomes more than 95%. We also find that the micromirrors should be tilted in a diagonal mode so as to maximize the contrast ratio that is defined by the ratio of the maximum amount of through light to the minimum.
Youngshik Jo, Dong-Seon Yoon, Seung-Woo Kim, Kyu-Ho Hwang, "Optical performance evaluation of thin-film micromirror array in projection display," Optical Engineering 41(2), (1 February 2002). http://dx.doi.org/10.1117/1.1430421
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KEYWORDS
Mirrors

Micromirrors

Diffraction

Computer simulations

Thin films

Geometrical optics

Optical engineering

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