1 February 2002 Stitching interferometric measurement data for inspection of large optical components
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Optical Engineering, 41(2), (2002). doi:10.1117/1.1430727
Abstract
An algorithm for stitching together a set of individual phase measurements into a unified larger phase map is presented. The set of individual phase maps results from scanning a component over the interferometer aperture and acquiring a measurement at each position. The algorithm is based on an iterative approach, where singular value decomposition is used to solve the rigid body movement problem between the different phase maps. The algorithm has been tested in numerical experiments and has been successfully applied to real data.
Mikael Sjoedahl, Bozenko F. Oreb, "Stitching interferometric measurement data for inspection of large optical components," Optical Engineering 41(2), (1 February 2002). http://dx.doi.org/10.1117/1.1430727
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KEYWORDS
Signal to noise ratio

Interferometers

Interferometry

Matrices

Inspection

Optical components

Optical inspection

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