1 March 2002 Adaptive optic correction using micro-electro-mechanical deformable mirrors
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A micromachined deformable mirror (?-DM) for optical wavefront correction is described. Design and manufacturing approaches for ?-DMs are detailed. The ?-DM employs a flexible silicon membrane supported by mechanical attachments to an array of electrostatic parallel plate actuators. Devices are fabricated through surface micromachining using polycrystalline silicon thin films. ?-DM membranes measuring 2 mmx2 mmx2 ?m, supported by 100 actuators are described. Figures of merit include stroke of 2 ?m, resolution of 10 nm, and frequency bandwidth dc to 7 kHz in air. The devices are compact, inexpensive to fabricate, exhibit no hysteresis, and use only a small fraction of the power required for conventional DMs. Performance of an adaptive optics system using a ?-DM is characterized in a closed-loop control experiment. Significant reduction in quasistatic wavefront phase error is achieved. Advantages and limitations of ?-DMs are described in relation to conventional adaptive optics systems and to emerging applications of adaptive optics such as high-resolution correction, small-aperture systems, and optical communication.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Julie A. Perreault, Julie A. Perreault, Thomas G. Bifano, Thomas G. Bifano, Bruce Martin Levine, Bruce Martin Levine, Mark N. Horenstein, Mark N. Horenstein, "Adaptive optic correction using micro-electro-mechanical deformable mirrors," Optical Engineering 41(3), (1 March 2002). https://doi.org/10.1117/1.1447230 . Submission:

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