1 April 2002 Phase-shifting interferometry: measurements with high-reflectance surfaces
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Abstract
With a phase-shifting Fizeau interferometer, problems arise in making accurate measurements of nominally flat optical surfaces with high-reflectance coatings. We describe a simple technique that can be used to make accurate measurements of such surfaces.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Parameswaran Hariharan, "Phase-shifting interferometry: measurements with high-reflectance surfaces," Optical Engineering 41(4), (1 April 2002). https://doi.org/10.1117/1.1457461 . Submission:
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