1 June 2002 Analysis of the wavelength-to-depth encoded interference microscopy for three-dimensional imaging
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Abstract
An interference microscope based on a wavelength-to-depth encoding technique is analyzed. The wavelength-to-depth encoding is achieved with a diffractive lens and a wavelength-tunable laser. The theoretical depth resolution is consistent with the experimental result. The technique offers a comparable depth resolution as traditional depth scanning. With the rapid advances in microfabrication and wavelength- tunable lasers, the system is promising for fast, noncontact, and high- resolution three-dimensional imaging.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Guoqiang Li, Guoqiang Li, Yeshaiahu Fainman, Yeshaiahu Fainman, } "Analysis of the wavelength-to-depth encoded interference microscopy for three-dimensional imaging," Optical Engineering 41(6), (1 June 2002). https://doi.org/10.1117/1.1474439 . Submission:
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