1 June 2002 Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm
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Abstract
Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (?p~83 nm). Above ?p the bilayers have a high reflectance comparable to that of single Al films. Ir films were deposited by electron gun evaporation on a heated substrate. Al films of various thicknesses are deposited by evaporation from a thermal source on the Ir film once it is cooled to room temperature. The bilayers are prepared under ultra-high-vacuum (UHV) conditions and their reflectance is measured in situ. Accelerated aging processes, which are performed by annealing the bilayers in UHV, show that the bilayers are stable after 1 h annealing at temperatures up to 540±625 K. The bilayers show no observable deterioration after long-term storage under normal atmosphere. The optical constants of Ir films are also obtained. In-orbit coating of optical surfaces with Ir/Al bilayers is proposed for extreme UV astronomy.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Juan I. Larruquert, Juan I. Larruquert, Jose Antonio Mendez, Jose Antonio Mendez, Jose Antonio Aznarez, Jose Antonio Aznarez, } "Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm," Optical Engineering 41(6), (1 June 2002). https://doi.org/10.1117/1.1477438 . Submission:
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