Error analysis on measuring angle-differential profiles of optical reflectivity by dynamic reflectometry

Augusto Garcia-Valenzuela; M. Pena-Gomar

doi:10.1117/1.1489052

1 August 2002 Error analysis on measuring angle-differential profiles of optical reflectivity by dynamic reflectometry

Augusto Garcia-Valenzuela; M. Pena-Gomar

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Optical Engineering, 41(8), (2002). doi:10.1117/1.1489052

Abstract

Laser reflectivity from an interface can be used to characterize, among other things, interface roughness, multilayer structure, and optical constants. In many cases, the reflectivity has sharp features that may be more apparent in a measurement of the angle derivative of the reflectivity.

Citation Download Citation

Augusto Garcia-Valenzuela, M. Pena-Gomar, "Error analysis on measuring angle-differential profiles of optical reflectivity by dynamic reflectometry," Optical Engineering 41(8), (1 August 2002). https://doi.org/10.1117/1.1489052

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