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1 August 2002 Improved reflectance and stability of Mo/Si multilayers
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© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Sasa Bajt, Jennifer B. Alameda, Troy W. Barbee, W. Miles Clift, James A. Folta, Benjamin B Kaufmann, and Eberhard Adolf Spiller "Improved reflectance and stability of Mo/Si multilayers," Optical Engineering 41(8), (1 August 2002). https://doi.org/10.1117/1.1489426
Published: 1 August 2002
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