Micro-Raman scattering and micro-photoluminescence of GaN thin films grown on sapphire by metalorganic chemical vapor deposition

Zhe Chuan Feng

doi:10.1117/1.1489051

Abstract

Microscale optical spectroscopic probe techniques, mainly micro-Raman scattering (m-RS) and microphotoluminescence (?-PL) spectroscopy, are employed to study a variety of GaN thin film materials, undoped and Si and Mg doped, grown on c-sapphire substrates by lowpressure metal-organic chemical vapor deposition. The optical properties and correlated structural features of these epitaxial materials grown under different conditions are studied. Visible micro-Raman measurements show different mode behaviors under different laser incidence configurations. Raman line shape analysis through two sets of equations leads to the monitoring of the sample quality and stress, and the optical determination of electrical properties of GaN films. An approximate 3 cm-1 shift in the E1 (LO) mode frequency is observed across the GaN film from the sapphire/GaN interface to the GaN surface, indicating the spatial variation of strains along the film growth direction within a few micrometers thickness range. Combined Raman and PL spectra are obtained under UV excitation, and interesting high-order resonance Raman features are observed using a sensitive UV-Raman-PL microscope. A new way to characterize the p-type GaN is introduced. These fruitful results demonstrate the capabilities of ?-RS-PL technology for the research and development of GaN and other materials.

Citation Download Citation

Zhe Chuan Feng, "Micro-Raman scattering and micro-photoluminescence of GaN thin films grown on sapphire by metalorganic chemical vapor deposition," Optical Engineering 41(8), (1 August 2002). https://doi.org/10.1117/1.1489051 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years