1 August 2002 Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio
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Abstract
The signal-to-noise ratio required to obtain 10-nm accuracy in the measurement of lateral position is studied with an interference microscope. Evaluations are performed using the rigorous coupled-wave analysis (RCWA) modal approach and Hopkins image formation theory.
© (2002) Society of Photo-Optical Instrumentation Engineers (SPIE)
Alexander V. Tavrov, Alexander V. Tavrov, Michael Totzeck, Michael Totzeck, Norbert Kerwien, Norbert Kerwien, Hans J. Tiziani, Hans J. Tiziani, } "Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio," Optical Engineering 41(8), (1 August 2002). https://doi.org/10.1117/1.1490589 . Submission:
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