1 September 2002 Fabrication of polymeric microlens of hemispherical shape using micromolding
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Optical Engineering, 41(9), (2002). doi:10.1117/1.1497617
Abstract
polymeric microlenses play an important role in reducing the size, weight, and cost of optical data storage and optical communication systems. We fabricate polymeric microlenses using the microcompression molding process. The design and fabrication procedures for mold insertion is simplified using silicon instead of metal. PMMA powder is used as the molding material. Governed by process parameters such as temperature and pressure histories, the micromolding process is controlled to minimize various defects that develop during the molding process. The radius of curvature and magnification ratio of fabricated microlens are measured as 150 ?m and over 3.0, respectively.
Su-dong Moon, Shinill Kang, Jonguk Bu, "Fabrication of polymeric microlens of hemispherical shape using micromolding," Optical Engineering 41(9), (1 September 2002). http://dx.doi.org/10.1117/1.1497617
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KEYWORDS
Microlens

Polymers

Silicon

Etching

Glasses

Photoresist materials

Process control

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