Optical fiber interferometer for measuring the in situ deflection characteristics of microelectromechanical structures

Tristan Jorge Tayag; Edward S. Kolesar Jr.; Kam See Hoon; James Marchetti; Ijaz H. Jafri

doi:10.1117/1.1525275

1 January 2003 Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures

Tristan Jorge Tayag, Edward S. Kolesar Jr., Kam See Hoon, James Marchetti, Ijaz H. Jafri

Optical Engineering, Vol. 42, Issue 1, (January 2003). https://doi.org/10.1117/1.1525275

An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Tristan Jorge Tayag, Edward S. Kolesar Jr., Kam See Hoon, James Marchetti, and Ijaz H. Jafri "Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1525275

Published: 1 January 2003

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