Optical design of a scatterometer with an ellipsoidal mirror

Martha Rosete-Aguilar; Oscar Rodriguez Herrera; Neil Charles Bruce

doi:10.1117/1.1573641

1 June 2003 Optical design of a scatterometer with an ellipsoidal mirror

Martha Rosete-Aguilar, Oscar Rodriguez Herrera, Neil Charles Bruce

Optical Engineering, Vol. 42, Issue 6, (June 2003). https://doi.org/10.1117/1.1573641

We analyze within the first-order approximation the design of a scatterometer with a prolate ellipsoidal mirror that collects the light from a rough surface and a subsidiary optical system that focuses the light onto an image plane.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Martha Rosete-Aguilar, Oscar Rodriguez Herrera, and Neil Charles Bruce "Optical design of a scatterometer with an ellipsoidal mirror," Optical Engineering 42(6), (1 June 2003). https://doi.org/10.1117/1.1573641

Published: 1 June 2003

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