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1 January 2003 High-stability white-light interferometry with reference signal for real-time correction of scanning errors
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© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Artur G. Olszak and Joanna Schmit "High-stability white-light interferometry with reference signal for real-time correction of scanning errors," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1523942
Published: 1 January 2003
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