Tristan Jorge Tayag,Edward S. Kolesar Texas Christian Univ. (United States) Kam See Hoon Nanyang Polytechnic (Singapore) James Marchetti,Ijaz H. Jafri Corning IntelliSense (United States)
An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.
Tristan Jorge Tayag, Edward S. Kolesar, Kam See Hoon, James Marchetti, Ijaz H. Jafri, "Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures," Opt. Eng. 42(1) (1 January 2003)