Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures

Tristan Jorge Tayag; Edward S. Kolesar; Kam See Hoon; James Marchetti; Ijaz H. Jafri

doi:10.1117/1.1525275

1 January 2003 Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures

Tristan Jorge Tayag; Edward S. Kolesar; Kam See Hoon; James Marchetti; Ijaz H. Jafri;

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Optical Engineering, 42(1), (2003). doi:10.1117/1.1525275

Abstract

An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.

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Tristan Jorge Tayag, Edward S. Kolesar, Kam See Hoon, James Marchetti, Ijaz H. Jafri, "Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1525275

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