1 January 2003 Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures
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Abstract
An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Tristan Jorge Tayag, Tristan Jorge Tayag, Edward S. Kolesar, Edward S. Kolesar, Kam See Hoon, Kam See Hoon, James Marchetti, James Marchetti, Ijaz H. Jafri, Ijaz H. Jafri, } "Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1525275 . Submission:
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