CONFERENCE PROCEEDINGS
Advanced Search >
Home > Journals > Optical Engineering > Volume 42 > Issue 1 > Article
1 January 2003 Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures
Tristan Jorge Tayag; Edward S. Kolesar; Kam See Hoon; James Marchetti; Ijaz H. Jafri
Author Affiliations +
Optical Engineering, 42(1), (2003). https://doi.org/10.1117/1.1525275
Abstract
An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Citation Download Citation
Tristan Jorge Tayag, Tristan Jorge Tayag, Edward S. Kolesar, Edward S. Kolesar, Kam See Hoon, Kam See Hoon, James Marchetti, James Marchetti, Ijaz H. Jafri, Ijaz H. Jafri, } "Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures," Optical Engineering 42(1), (1 January 2003). https://doi.org/10.1117/1.1525275 . Submission:
ACCESS THE FULL ARTICLE
PERSONAL SIGN IN
Full access may be available with your subscription
 
Forgot your username?
Forgot your password?
No SPIE account? Create an account
or Institutional Sign In via Shibboleth
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $20.00
Non-members: $25.00 ADD TO CART
JOURNAL ARTICLE
 7 PAGES
DOWNLOAD PDF + SAVE TO MY LIBRARY
SHARE
GET CITATION
KEYWORDS
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top