1 October 2003 Three-dimensional profilometer for supersmooth surface
Author Affiliations +
Equipment with a bifocus objective lens to detect the profile of a supersmooth surface in three dimensions is presented. The basic optical system is an interference system with a fully common optical path. Such an optical structure, which includes the bifocus lens and interference system, can result in the optical common ejection effect. Furthermore, by the electronic common ejection, the instrument can detect the profile within 0.1 nm vertically and 1 μm laterally. The principle of the optical common ejection and the structure of this equipment is described in detail.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yuanqing Wang, "Three-dimensional profilometer for supersmooth surface," Optical Engineering 42(10), (1 October 2003). https://doi.org/10.1117/1.1603758 . Submission:


Generation and amplification of vector vortex beams
Proceedings of SPIE (February 16 2018)
Polarization analysis system for very rough surfaces
Proceedings of SPIE (October 03 1997)
Dynamic surface roughness profiler
Proceedings of SPIE (October 15 2012)
Nonpolarization parallel beamsplitter
Proceedings of SPIE (December 10 1992)

Back to Top