1 December 2003 High speed three-dimensional profilometry utilizing laser diode arrays
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Abstract
A laser diode array probe design concept utilizing an optical scanning technique for high-speed and high-precision 3-D profile measurement is presented. The probe consists of 100 laser lines emerging from 100 laser diodes, arranged in five rows. This measurement method adopts the idea of a fringe projection technique. A profile is obtained by projecting multiple laser beams simultaneously onto the surface or using single-beam scans on the surface. The specimen profile data are obtained without the need for a scanning mechanism. The beams projected onto the surface could cause distinguishing difficulties for a complicated profile. This problem was resolved using a computer to control the on/off sequences for the diode array light source. The measurement accuracy is equivalent to the conventional single laser beam scanning measurement system. The measurement speed depends on the optical scanning process and usually occurs in less than 1 s when multibeam scanning is used.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ming Chang, Ming Chang, Wei-Che Chang, Wei-Che Chang, Kao-Hui Lin, Kao-Hui Lin, } "High speed three-dimensional profilometry utilizing laser diode arrays," Optical Engineering 42(12), (1 December 2003). https://doi.org/10.1117/1.1621408 . Submission:
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