High speed three-dimensional profilometry utilizing laser diode arrays

Ming Chang; Wei-Che Chang; Kao-Hui Lin

doi:10.1117/1.1621408

Abstract

A laser diode array probe design concept utilizing an optical scanning technique for high-speed and high-precision 3-D profile measurement is presented. The probe consists of 100 laser lines emerging from 100 laser diodes, arranged in five rows. This measurement method adopts the idea of a fringe projection technique. A profile is obtained by projecting multiple laser beams simultaneously onto the surface or using single-beam scans on the surface. The specimen profile data are obtained without the need for a scanning mechanism. The beams projected onto the surface could cause distinguishing difficulties for a complicated profile. This problem was resolved using a computer to control the on/off sequences for the diode array light source. The measurement accuracy is equivalent to the conventional single laser beam scanning measurement system. The measurement speed depends on the optical scanning process and usually occurs in less than 1 s when multibeam scanning is used.

Citation Download Citation

Ming Chang, Ming Chang, Wei-Che Chang, Wei-Che Chang, Kao-Hui Lin, Kao-Hui Lin, } "High speed three-dimensional profilometry utilizing laser diode arrays," Optical Engineering 42(12), (1 December 2003). https://doi.org/10.1117/1.1621408 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years