1 February 2003 Improved sol-gel thin film for fabrication of multilevel structures using an HEBS gray scale mask
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Abstract
A new photosensitive negative-tone inorganic-organic hybrid SiO2/TiO2 glass with improved linear UV response property is investigated for fabrication of multilevel structures. The UV response of the sol-gel material is studied as a function of optical densities (ODs) of a high-energy beam-sensitive (HEBS) gray-scale mask. It is shown that the sol-gel material exhibits a good linear response to the OD values, which is ultimately used to define the surface profile height for a specific design. The linearity is especially useful for fabrication of diffractive optical elements with linear phase distributions. As an example, we apply the sol-gel process and the gray-scale mask to the fabrication of a blazed grating.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
XiaoCong Yuan, W. X. Yu, Nam Quoc Ngo, Wai Chye Cheong, "Improved sol-gel thin film for fabrication of multilevel structures using an HEBS gray scale mask," Optical Engineering 42(2), (1 February 2003). https://doi.org/10.1117/1.1535202 . Submission:
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