1 March 2003 Fiber optic off-focus sensor for surface topography measurement
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Abstract
A fiber optic-based off-focus surface topography sensor is proposed based on beam reflection. A specially arranged fiber optic probe with an objective microlens is used for the surface off-focus detection, and a CCD to reduce the inconsistency of the discrete detectors and the difficulties of the multichannel simultaneous signal acquisition. According to the unique signal analysis methods, surface topography as well as distance between the measured surface and sensor probe can be obtained at one measurement setup. Sensor structure and the measurement principle are described, and theoretical analysis and preliminary experimental results indicate the validity and feasibility of the proposed method.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yong Zhao, Yong Zhao, Yanbiao Liao, Yanbiao Liao, Shurong Lai, Shurong Lai, } "Fiber optic off-focus sensor for surface topography measurement," Optical Engineering 42(3), (1 March 2003). https://doi.org/10.1117/1.1539052 . Submission:
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