1 April 2003 Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner
Author Affiliations +
Abstract
Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of ∓52 mrad (∓3 deg), and a resolution <5 μrad. The main dominant parameters that affect the distortion profile are identified. Furthermore, a vector analysis is derived to represent these distortions, and equations of the correction factors used to compensate for the systematic errors are proposed. A final accuracy better than 0.05% is obtained when these compensation factors are taken into account. The derivation proposed here can be extended to any scanning device with a single mirror with two-rotation DOF.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Moustapha Hafez, Thomas C. Sidler, Rene-Paul Salathe, "Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner," Optical Engineering 42(4), (1 April 2003). https://doi.org/10.1117/1.1557694 . Submission:
JOURNAL ARTICLE
10 PAGES


SHARE
Back to Top