1 June 2003 Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry
Author Affiliations +
Abstract
Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to calibration-based highly accurate phase-shifting projected fringe profilometry are presented. The main advantages of using digital sinusoidal gratings are (1) high geometrical accuracy (< 1 μm); (2) high contrast ratio; and (3) very low high-order harmonic distortion. In addition, a high-quality diffusive flat with precisely controlled lateral correlation length, fabricated by VLSI processes, offers a good calibration standard. It is found that, by applying these two components to the calibration-based phase-shifting projected fringe profilometry, absolute 3-D surface profile measurement accuracy on the order of microns can be achieved.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Wei-Hung Su, Wei-Hung Su, Hongyu Liu, Hongyu Liu, Karl Richard, Karl Richard, Shizhuo Yin, Shizhuo Yin, Francis T. S. Yu, Francis T. S. Yu, } "Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry," Optical Engineering 42(6), (1 June 2003). https://doi.org/10.1117/1.1573217 . Submission:
JOURNAL ARTICLE
11 PAGES


SHARE
Back to Top