1 June 2003 Optical design of a scatterometer with an ellipsoidal mirror
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Abstract
We analyze within the first-order approximation the design of a scatterometer with a prolate ellipsoidal mirror that collects the light from a rough surface and a subsidiary optical system that focuses the light onto an image plane.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Martha Rosete-Aguilar, Martha Rosete-Aguilar, Oscar Rodriguez Herrera, Oscar Rodriguez Herrera, Neil Charles Bruce, Neil Charles Bruce, } "Optical design of a scatterometer with an ellipsoidal mirror," Optical Engineering 42(6), (1 June 2003). https://doi.org/10.1117/1.1573641 . Submission:
JOURNAL ARTICLE
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