1 January 2004 Multiplexed sensor system for simultaneous measurement of pressure and temperature
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Abstract
A novel multiplexed sensor system using two tunable lasers for simultaneous precise measurement of pressure and temperature is designed, tested, and simulated. The sensors are optical Fabry-Pérot cavity-based pressure sensors similar to those fabricated by us using microelectromechanical systems (MEMS) techniques. This system follows a different philosophy than that followed by other multiplexing systems. We use light sources in two wavelength regions for each sensor and two interrogation methods for pressure and temperature measurement. Sensors are designed to operate over the pressure range of 0 to 30 psi and the temperature range of 25 to 90°C. This multiplexed sensor system has the potential of multiplexing about seven sensors with temperature sensitivity of 0.15 nm/°C.
© (2004) Society of Photo-Optical Instrumentation Engineers (SPIE)
Weizhuo Li, Weizhuo Li, Don C. Abeysinghe, Don C. Abeysinghe, Joseph T. Boyd, Joseph T. Boyd, } "Multiplexed sensor system for simultaneous measurement of pressure and temperature," Optical Engineering 43(1), (1 January 2004). https://doi.org/10.1117/1.1630315 . Submission:
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