A new method for calculating the transmittance function of a multilevel diffractive optical element is described. Multiple internal reflections in the diffractive optical element induce phase and amplitude modulation errors that deviate from the conventional transmittance function model. A transmittance function model of a multilevel diffractive optical element is devised, taking these multiple internal reflections into account. The results show that a surface relief profile of a multilevel diffractive optical element without phase modulation errors can be constructed based on the proposed model.
Hwi Kim,
Byoungho Lee,
"Calculation of the transmittance function of a multilevel diffractive optical element considering multiple internal reflections," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1795817
Hwi Kim, Byoungho Lee, "Calculation of the transmittance function of a multilevel diffractive optical element considering multiple internal reflections," Opt. Eng. 43(11) (1 November 2004)