Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator

Yanzhe Tang; Wenhui Wang; Yaming Wu; Jianyi Yang; Yuelin Wang

doi:10.1117/1.1804545

1 November 2004 Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator

Yanzhe Tang, Wenhui Wang, Yaming Wu, Jianyi Yang, Yuelin Wang

Author Affiliations +

Optical Engineering, Vol. 43, Issue 11, (November 2004). https://doi.org/10.1117/1.1804545

Abstract

A 1x8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yanzhe Tang, Wenhui Wang, Yaming Wu, Jianyi Yang, and Yuelin Wang "Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1804545

Published: 1 November 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available