1 November 2004 Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator
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Optical Engineering, 43(11), (2004). doi:10.1117/1.1804545
Abstract
A 1x8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error.
Yanzhe Tang, Wenhui Wang, Yaming Wu, Jianyi Yang, Yuelin Wang, "Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1804545
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