1 November 2004 Design and fabrication technologies for ultraviolet replicated micro-optics
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Abstract
A wafer scale UV replication process is described that is suitable for mass production of micro-optical components. The fabrication process is divided into two phases. In phase 1, the design and mastering is done and a wafer-sized embossing tool is fabricated. In phase 2 of the process chain, the batch fabrication process is performed. From a single embossing tool, several identical wafer-sized replicas are fabricated that are then diced into the final components. Single-sided as well as double-sided replicas can be made. The economical flexibility of the UV replication chain is demonstrated through two application examples: High-quality components that pass strict environmental tests, which compete with etched silica structures, and low-cost micro-optical components, which compete with microinjection molded parts. All UV-replicated components have in common that they exhibit excellent optical quality and pass an IR reflow process.
© (2004) Society of Photo-Optical Instrumentation Engineers (SPIE)
Hartmut Rudmann, Hartmut Rudmann, Markus Rossi, Markus Rossi, } "Design and fabrication technologies for ultraviolet replicated micro-optics," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1803554 . Submission:
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