1 November 2004 Monolithically integrated refractive microlens array to improve imaging quality of an infrared focal plane array
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Abstract
A simple reflow technique and reactive-ion etching are employed to fabricate and integrate a refractive square-apertured arch Si microlens array (MLA) on the back of an IR focal plane array device (IRFPA), resulting in the formation of a monolithic MLA/IRFPA device. The fabricated on-chip Si MLA behaves as optical concentrators and is used to collect most of the incident light from each pixel area on a smaller photosensitive area of the IRFPA, causing the IR response characteristics of the monolithic device to be improved greatly when compared with an ordinary IRFPA device without the MLA. The advantages of employing the reflow technique and the reactive-ion etching lie not only in the excellent surface smoothness and dimensional uniformity of the fabricated MLA, but also as a cost-effective and mass production technology.
Miao He, Xiaocong Yuan, Jonathan Kenjin Moh, Jing Bu, Xin-Jian Yi, "Monolithically integrated refractive microlens array to improve imaging quality of an infrared focal plane array," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1801431
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