1 April 2004 Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching
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Optical Engineering, 43(4), (2004). doi:10.1117/1.1648652
Abstract
A thermo-optic Mach-Zehnder (MZ) variable optical attenuator based on silicon waveguides with a large cross section was designed and fabricated on silicon-on-insulator (SOI) wafer. Multimode interferometers were used as power splitters and combiners in the MZ structure. In order to achieve a smooth interface, anisotropic chemical etching of silicon was used to fabricate the waveguides. Isolating grooves were introduced to reduce power consumption and device length. The device has a low power consumption of 210 mW and a response time of 50 µs.
Jinsong Xia, Jinzhong Yu, Zhongcao Fan, Zhangtao Wang, Shaowu Chen, "Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching," Optical Engineering 43(4), (1 April 2004). http://dx.doi.org/10.1117/1.1648652
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KEYWORDS
Silicon

Waveguides

Semiconducting wafers

Wet etching

Thermal optics

Variable optical attenuators

Etching

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