1 May 2004 Joint interferometric measurement of planarity and parallelism
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Abstract
An interferometric method to simultaneously test plane parallel plates both for planarity and parallelism of end faces is reported. Measurements are taken by insertion of the plates in a reference cavity. The optical configuration uses a standard programmable interferometer, with an external right-angle prism folding back the probe beam. The prism error is determined by cavity calibration, and is subtracted at data reduction. The measuring procedure is discussed in detail, and results of a laboratory demonstration are presented.
Maurizio M.V. Vannoni, Giuseppe Molesini, "Joint interferometric measurement of planarity and parallelism," Optical Engineering 43(5), (1 May 2004). https://doi.org/10.1117/1.1689334
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