1 May 2004 Waveguide and guided-wave devices consisting of heterostructured photonic crystals
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We report a strategy for the industrialization of photonic-crystal-based optical devices, starting with a review of the requirements for passive photonic crystal components. Although they have remarkable properties, such components are difficult to couple to/from optical fibers and have a relatively large propagation loss. We present an approach for meeting the requirements by using heterostructured photonic crystals fabricated by the autocloning technology. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 multilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber, and the loss is estimated as 0.1 dB/mm. A resonator with Q =11,700 is also demonstrated. Recent progress and the future outlooks for the technology are also discussed.
Yasuo Ohtera, Hiroyuki Ohkubo, Kenta Miura, Takashi Sato, Takayuki Kawashima, Shojiro Kawakami, "Waveguide and guided-wave devices consisting of heterostructured photonic crystals," Optical Engineering 43(5), (1 May 2004). https://doi.org/10.1117/1.1695407

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