1 January 2005 Surface profiling using phase shifting Talbot interferometric technique
Author Affiliations +
Optical Engineering, 44(1), 013601 (2005). doi:10.1117/1.1827608
Abstract
We implement a phase-shifting Talbot interferometric technique to measure step heights of a single-step and channel (dip) objects. Experimentally recorded interferograms include noise due to grating lines and speckles. To make the phase map, four interferograms are recorded with π/2 phase shifts. To remove noise due to grating lines and speckle, interferogram data are first filtered using Fourier filtering. Height variations per profile of the objects is calculated from the phase map made using Fourier-filtered data. Results obtained from this technique are compared with the results acquired from a profile projector having a coordinate measurement facility with a resolution of 1 µm and an accuracy of ±1 µm. The results are in good agreement.
Saba Mirza, Chandra Shakher, "Surface profiling using phase shifting Talbot interferometric technique," Optical Engineering 44(1), 013601 (1 January 2005). http://dx.doi.org/10.1117/1.1827608
JOURNAL ARTICLE
6 PAGES


SHARE
KEYWORDS
Interferometry

Phase shifts

Projection systems

Fringe analysis

Profiling

Phase shifting

Optical engineering

RELATED CONTENT


Back to Top