1 December 2005 Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement
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A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal's stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera's exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Xuefeng Zhao, Xuefeng Zhao, Takamasa Suzuki, Takamasa Suzuki, Takamasa Masutomi, Takamasa Masutomi, Osami Sasaki, Osami Sasaki, } "Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement," Optical Engineering 44(12), 125602 (1 December 2005). https://doi.org/10.1117/1.2148447 . Submission:

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