1 March 2005 Characterization of a wavelength-tunable antenna-coupled infrared microbolometer
Author Affiliations +
Optical Engineering, 44(3), 036402 (2005). doi:10.1117/1.1869892
Abstract
Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.5 µm near 10 µm. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees well with measured results.
Michael A. Gritz, Meredith Metzler, Mohamed Ramy Abdel-Rahmen, Brian Monacelli, Guy Zummo, Donald Malocha, Glenn D. Boreman, "Characterization of a wavelength-tunable antenna-coupled infrared microbolometer," Optical Engineering 44(3), 036402 (1 March 2005). http://dx.doi.org/10.1117/1.1869892
JOURNAL ARTICLE
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KEYWORDS
Antennas

Silicon

Wavelength tuning

Capacitance

Microbolometers

Semiconductors

Infrared radiation

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