1 April 2005 Two-period interference fringes interferometry
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Abstract
A novel measuring method, two-period interference fringes interferometry, is described. The principle of this method is different from that of the two-wavelength interferometry that is widely known. Two interference fringes, with a little difference between their spatial periods, are obtained by turning a binary step grating and produce a synthetic equivalent period much longer than either of the two periods. The interference fringes are produced by the ±first-order beams diffracted from the grating. The intensity distribution of the interference pattern is independent of the wavelength of the laser-diode light source used. The measuring range of this method is much larger than that of the two-wavelength interferometery. A sinusoidal phase modulating technique is easily applied to detect the phase distribution of interference pattern by vibrating the grating sinusoidally. The plane reflector of ~3 mm thickness is measured to verify this novel method.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Yande Xu, Yande Xu, } "Two-period interference fringes interferometry," Optical Engineering 44(4), 045601 (1 April 2005). https://doi.org/10.1117/1.1883697 . Submission:
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