1 January 2006 In-process inspection of surface-profile properties by detecting laser beam deflection
Author Affiliations +
Optical Engineering, 45(1), 013601 (2006). doi:10.1117/1.2150821
Abstract
An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6σ. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms.
Ryo Shinozaki, Osami Sasaki, Takamasa Suzuki, "In-process inspection of surface-profile properties by detecting laser beam deflection," Optical Engineering 45(1), 013601 (1 January 2006). http://dx.doi.org/10.1117/1.2150821
JOURNAL ARTICLE
5 PAGES


SHARE
KEYWORDS
Inspection

Optical proximity correction

Mirrors

Curium

Optical inspection

Phase modulation

Sensors

RELATED CONTENT

Fiber optic halide sensor based on fluorescence quenching
Proceedings of SPIE (April 16 1992)
Stereoscopic Vision - An Application Oriented Overview
Proceedings of SPIE (April 01 1990)
Measurement Of Small Transient Deformations
Proceedings of SPIE (November 09 1989)
X ray testing Constellation X optics at MSFC's 100 m...
Proceedings of SPIE (January 29 2004)

Back to Top