1 November 2006 Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm
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Optical Engineering, 45(11), 115602 (2006). doi:10.1117/1.2387882
Abstract
We show how an eight-step algorithm with a high tolerance for phase-shift miscalibration can be used with a conventional Mirau interferometer, with only minor modifications to the software, for two-wavelength interferometric profilometry of surfaces exhibiting steps and discontinuities.
Joanna Schmit, Parameswaran Hariharan, "Two-wavelength interferometric profilometry with a phase-step error-compensating algorithm," Optical Engineering 45(11), 115602 (1 November 2006). http://dx.doi.org/10.1117/1.2387882
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KEYWORDS
Interferometry

Algorithm development

Phase measurement

Detection and tracking algorithms

Phase shifts

Tolerancing

3D displays

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