1 February 2006 Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern
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Abstract
A method is proposed for accurately measuring a sectional profile of a metal cylinder. In this method a sinusoidally vibrating sinusoidal interference pattern is used to generate an exact spatial scale along one direction. Light from top points of a metal cylinder surface is extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the metal cylinder is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jinhuan Li, Jinhuan Li, Osami Sasaki, Osami Sasaki, Takamasa Suzuki, Takamasa Suzuki, } "Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern," Optical Engineering 45(2), 023601 (1 February 2006). https://doi.org/10.1117/1.2166848 . Submission:
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