1 February 2006 Accurate measurements at interferometric ellipsometer
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Abstract
It is known that the beamsplitter in interference ellipsometers is one of the possible sources of inaccuracy. In the general case, the polarizing effect of the beamsplitter adds systematic error to measurement results. Moreover, accurate measurements require such preliminary steps as precise determination of test specimen polarization axes and their alignment relative to the ellipsometer axes. We propose a new retardance measurement method that is free from these disadvantages. This becomes possible due to specimen rotation around the axis and constant interference signals tracking.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Galina A. Lysenko, Alexander V. Krioukov, Yuri Y. Kachurin, Vitaly V. Pogodaev, "Accurate measurements at interferometric ellipsometer," Optical Engineering 45(2), 023605 (1 February 2006). https://doi.org/10.1117/1.2172352 . Submission:
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