1 April 2006 Two-dimensional small-rotation-angle measurement using an imaging method
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A two-dimensional small-rotation-angle measurement system based on fringe projection is proposed and demonstrated. Simple and effective signal processing is described and applied to the angular calculation. Several measurements indicate a measurement accuracy of ≈ 0.4 arcsec, which is comparable to that of a high-priced autocollimator. The two-dimensional two-pitch grating used in our prototype system provides a wide measurement range, which is expected to reach 1300 arcsec for both x- and y-direction rotations.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Takamasa Suzuki, Takanori Endo, Osami Sasaki, John E. Greivenkamp, "Two-dimensional small-rotation-angle measurement using an imaging method," Optical Engineering 45(4), 043604 (1 April 2006). https://doi.org/10.1117/1.2188945 . Submission:

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