1 April 2006 Air-core hollow optical waveguides with omnidirectional reflectors
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Abstract
We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO2 (0.111/0.258 µm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Shih-Shou Lo, Shih-Shou Lo, Chii-Chang Chen, Chii-Chang Chen, } "Air-core hollow optical waveguides with omnidirectional reflectors," Optical Engineering 45(4), 044601 (1 April 2006). https://doi.org/10.1117/1.2189289 . Submission:
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