1 June 2006 Influence of deposition temperature on the properties of high-reflectivity coatings
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Abstract
The effect of deposition temperature on the properties of 355-nm high-reflectivity (HR) coatings was investigated. A series of 355-nm HR coatings were deposited by electron-beam evaporation using the same deposition process, but different deposition temperatures: 200, 250, 280, and 320 °C. Transmittance and high reflectance of the samples were measured with a Lambda 900 spectrometer, and the highest reflectance, 98.7%, was achieved at a deposition temperature of 280 °C. The laser-induced damage threshold (LIDT) was measured with a 355-nm pulsed laser with a pulse width of 8 ns. It was found that the deposition temperature had a significant effect on the LIDT of coatings. LIDTs up to 18.5 J/cm2 were achieved when the deposition temperature was 280 °C. The LIDT of the coating deposited at 280 °C is about three times greater than that of coatings deposited at the other temperatures. Damage morphologies of samples at different deposition temperatures were observed with a Leica-DMRXE microscope. Microstructures of the samples were characterized by x-ray diffraction (XRD). An absorptance-dominated model is proposed, which agrees very well with the damage threshold results.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Meiqiong Zhan, Meiqiong Zhan, Tianya Tan, Tianya Tan, Dawei Zhang, Dawei Zhang, Hongbo He, Hongbo He, Jianda Shao, Jianda Shao, Zhengxiu Fan, Zhengxiu Fan, } "Influence of deposition temperature on the properties of high-reflectivity coatings," Optical Engineering 45(6), 063801 (1 June 2006). https://doi.org/10.1117/1.2211647 . Submission:
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