1 June 2006 Attenuation-controllable micromachined 2×2 optical switches using 45-deg micromirrors
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Abstract
This paper presents two types of attenuation-controllable 2×2 optical switches utilizing V-shaped 45-deg micromirrors. One type utilizes four single-face mirrors, and the other has a simplified configuration utilizing two double-face mirrors. The designed devices were fabricated on a silicon-on-insulator wafer with a structural layer of 80-µm thickness. Two pairs of lensed fibers with a focal length of 150 µm were aligned for optical characterization. Experiments on the simplified design showed optical insertion losses of less than 1.9 dB and on/off ratios larger than 70 dB. The optical power can be controlled up to a maximum attenuation level of 50 dB within ±0.1 dB tolerance in the other channels. Because the overall optical performance of the two types was verified to be almost the same, the simplified design will be more desirable for practical applications.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ho Nam Kwon, Tae-Hwan Kim, Hiroshi Toshiyoshi, Jong-Hyun Lee, "Attenuation-controllable micromachined 2×2 optical switches using 45-deg micromirrors," Optical Engineering 45(6), 065009 (1 June 2006). https://doi.org/10.1117/1.2202924 . Submission:
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