1 August 2006 Characterization of a self-mixing displacement sensor under moderate feedback
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Abstract
A displacement sensor enabling us to perform measurements under moderate feedback has been designed with a resolution up to 40 nm. Its performance can be optimized by using the wavelet transform when the signal is disturbed by electromagnetic fields, mechanical coupling, or speckle effect. By determining the repeatability and the reproducibility of this sensor, we have also demonstrated that this measuring device is suitable for statistical process control when an interval of tolerance of ±300 nm is required.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Caroline Bès, Caroline Bès, Thierry M. Bosch, Thierry M. Bosch, Guy Plantier, Guy Plantier, Francis Bony, Francis Bony, } "Characterization of a self-mixing displacement sensor under moderate feedback," Optical Engineering 45(8), 084402 (1 August 2006). https://doi.org/10.1117/1.2337575 . Submission:
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