1 September 2006 Three-dimensional displacement measurement by using reversed phase-shifting electronic speckle pattern interferometry
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Optical Engineering, 45(9), 093602 (2006). doi:10.1117/1.2349530
Abstract
A method for three-dimensional (3D) displacement measurement by separating out-of-plane displacement from in-plane displacement is presented. A reference beam is added to a dual-beam symmetric illumination electronic speckle pattern interferometry (ESPI) system and shared by the two illuminations. The test object is illuminated by the two object beams, respectively. Two phase maps, which include out-of-plane and in-plane displacement, can be obtained by phase-shifting techniques. In order to decrease electronic noises in the phase maps, one of the phase maps is calculated by the reversed phase-shifting method presented. By using inverse phase distribution, out-of-plane displacement can be easily separated from in-plane displacement by subtraction and can greatly decrease electronic noises. The principle of the method is presented and proved by a typical three-point bending experiment. Experimental results are offered.
Ping Sun, "Three-dimensional displacement measurement by using reversed phase-shifting electronic speckle pattern interferometry," Optical Engineering 45(9), 093602 (1 September 2006). http://dx.doi.org/10.1117/1.2349530
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KEYWORDS
Phase shifts

3D metrology

Interferometers

Speckle pattern

Beam splitters

Interferometry

Optical engineering

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