1 November 2007 Diffractive position sensing devices using two-dimensional grating dots
Author Affiliations +
Optical Engineering, 46(11), 113602 (2007). doi:10.1117/1.2802079
Abstract
A new type of position sensing device (PSD) is proposed in this paper. The proposed PSDs are composed of two-dimensional grating dots. The grating dots of a new PSD can diffract an incident laser beam into many spots. By identifying the maximum and minimum values of the designed numbers of the diffracted spots, the one- or two-dimensional position of the center of the laser beam can be precisely determined. Because the operations are very easy and the mass-production costs are cheap for the proposed PSDs, the PSDs are useful.
Sheng-Lih L. Yeh, Kuang Tsan Lin, "Diffractive position sensing devices using two-dimensional grating dots," Optical Engineering 46(11), 113602 (1 November 2007). http://dx.doi.org/10.1117/1.2802079
JOURNAL ARTICLE
5 PAGES


SHARE
KEYWORDS
Diffraction gratings

Diffraction

Optical engineering

Photoresist materials

Helium neon lasers

Optical design

Photoresist developing

RELATED CONTENT

Organic CMOS technology by interface treatment
Proceedings of SPIE (August 25 2006)
Diffraction Tomography
Proceedings of SPIE (September 22 1983)
The fabrication of the holographic dual-blazed grating
Proceedings of SPIE (December 21 2013)

Back to Top